Parts for Plasma Chambers

Electrostatic Chucks – Quality at a fair price

Changes in the surface condition, deformations due to mechanical exposure and damage to the anodisation result in the fact that electrostatic chucks for etching chambers have to be replaced. Purchasing costs are very high and delivery times of the OEM hardly acceptable.

We offer electrostatic chucks for diameters ranging from 150mm to 200mm for LAM Research 9400, 9600, Rainbow and Alliance etching systems. They will convince you in every respect!

You will receive a chuck, which in quality, function and design equals the original product to 100%. No variation to your production processes can be guaranteed. The only change you will experience are significantly reduced prices and prompt delivery.

This means improved productivity, reliability and lower costs as well as shorter response times.

amcoss provides electrostatic chucks with the following OEM numbers:

  • 718-043893-602
    ESC 6“ Alliance 4420XL Poly Etch
  • 718-043893-612
    ESC 6“ Rainbow TCP9600 Alu Etch
  • 718-043893-801
    ESC 8“ Alliance 9400/9600 PTX
  • 718-043893-818
    LAM ESC 8“ (new)
  • 718-092326-061
    ESC TCP9600 Metal 6“
  • 718-094523-261
    ESC PTX9400 Poly 6“
  • 718-094523-281
    ESC PTX9400 Poly 8“
  • 718-094756-061
    ESC TCP9600 SE Metal ELECTD, UPPR, 6“ ESC, MJR FLA, NEW
  • 718-094756-081
    ESC TCP9600 Metal 8“

Download article numbers electrostatic chucks!