Electrostatic Chucks – Quality at a fair price
Changes in the surface condition, deformations due to mechanical exposure and damage to the anodisation result in the fact that electrostatic chucks for etching chambers have to be replaced. Purchasing costs are very high and delivery times of the OEM hardly acceptable.
We offer electrostatic chucks for diameters ranging from 150mm to 200mm for LAM Research 9400, 9600, Rainbow and Alliance etching systems. They will convince you in every respect!
You will receive a chuck, which in quality, function and design equals the original product to 100%. No variation to your production processes can be guaranteed. The only change you will experience are significantly reduced prices and prompt delivery.
This means improved productivity, reliability and lower costs as well as shorter response times.
amcoss provides electrostatic chucks with the following OEM numbers:
ESC 6“ Alliance 4420XL Poly Etch
ESC 6“ Rainbow TCP9600 Alu Etch
ESC 8“ Alliance 9400/9600 PTX
LAM ESC 8“ (new)
ESC TCP9600 Metal 6“
ESC PTX9400 Poly 6“
ESC PTX9400 Poly 8“
ESC TCP9600 SE Metal ELECTD, UPPR, 6“ ESC, MJR FLA, NEW
ESC TCP9600 Metal 8“