Special Parts – Engineering skills for outstanding ceramics
The particularity of this component lies in its extremely big diameter, requiring expert competence in production.
Material: aluminium oxide ceramic
Diameter: 600 mm,
Wall thickness: 12 mm
Application: electrical isolation of vacuum chamber components
Flip Arm 8“
The characteristics of this complex ceramic module are some extremely thin component parts as well as angularly drilled tiny holes.
Materials: aluminium oxide ceramics and stainless steel
Thickness: only minimal 0,2 mm in the relieved areas
Drill hole: 8 pcs., diameter 0,9 mm, drilled in an angle of 45°
Combination ceramic to stainless steel by special bonding process
Application: wafer handling
Ceramic tube with grooves inside
This component is a plasma etching chamber with quite huge dimensions. The grooving structure inside the ceramic tube is very special and thus hard to produce.
Material: aluminium oxide ceramics
Dimensions: external diameter 200 mm, height 300mm
Application: plasma etching chamber